Performance enhancement for piezoresistive microaccelerometer by geometrical design: a focused review

Abstract

Purpose – This paper aims to provide a focused review on the geometrical designs for performance enhancement of piezoresistive microaccelerometers. Design/methodology/approach – By analyzing working principle and conventional geometries, the improved research proposals are sorted into three groups in terms of their anticipated objectives, including sensitivity, resonant frequency and cross-axis sensitivity. Accessible methods are outlined and their merits and demerits are described. Findings – Novel geometries obviously enhance the performance of accelerometers, and the efficacy can be further elevated by newer materials and fabrication processes. Research limitations/implications – This paper mainly focused on the improved geometrical designs for sensitivity, resonant frequency and cross-axis sensitivity. Other performance parameters or design schemes are not included in this paper. Originality/value – This paper generalizes the available geometries and methods for the enhancement of sensitivity, resonant frequency and cross-axis sensitivity in piezoresistive accelerometers design.