Optimal design of high-g MEMS piezoresistive accelerometer based on Timoshenko beam theory-Reference-Cited by-同舟云学术

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Optimal design of high-g MEMS piezoresistive accelerometer based on Timoshenko beam theory

Published:2017-12-01 Issue:2 Volume:24 Page:855-867
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Liu Feng^ORCID,Gao Shiqiao,Niu Shaohua,Zhang Yan,Guan Yanwei,Gao Chunhui,Li Ping

Funder

The National High Technology Research and Development Program of China

Scientific and Technological Project of Henan Province

Key Research Projects of Henan College and University

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/article/10.1007/s00542-017-3585-4/fulltext.html

Reference28 articles.

1. Atwell AR, Okojie RS, Kornegay KT et al (2003) Simulation, fabrication and testing of bulk micromachined 6H-SiC high-g piezoresistive accelerometers. Sens Actuators A 104(1):11–18

2. Banerjee JR (2001) Frequency equation and mode shape formulae for composite Timoshenko beams. Compos Struct 51(4):381–388

3. Béliveau A, Spencer GT, Thomas KA et al (1999) Evaluation of MEMS capacitive accelerometers. IEEE Des Test Comput 16(4):48–56

4. Bruch JC, Mitchell TP (1987) Vibrations of a mass-loaded clamped-free Timoshenko beam. J Sound Vib 114(2):341–345

5. Endevco (2017) Problems in high-shock measurement [M]. Endevco Technical Paper, pp 1–9

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