Author:
Torii Akihiro,Sasaki Minoru,Hane Kazuhiro,Okuma Shigeru
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference12 articles.
1. Investigations on free-standing polysilicon beams in view of their application as transducers;Linder;Sensors and Actuators,2123
2. The effect of release-etch processing on surface microstructure stiction;Alley;IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, USA,1992
3. Simple experimental technique for the measurement of the work of adhesion of microstructures;Mastrangelo;IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, USA,1992
4. Investigation of attractive forces between PECVD silicon nitride microstructures and an oxidized silicon substrate;Scheeper;Sensors and Actuators A,1992
5. Atomic force microscope;Binnig;Phy. Rev. Lett.,1956
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