The design and fabrication of a magnetically actuated micromachined flow valve-Reference-Cited by-同舟云学术

The design and fabrication of a magnetically actuated micromachined flow valve

Published:1990-05 Issue:1 Volume:24 Page:47-53
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Smith R.L.,Bower R.W.,Collins S.D.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. A thermopneumatic actuation principle for a microminiature pump and other micromechanical devices;de Pol;Sensors and Actuators,1989

2. The fabrication of integrated mass flow controllers;Esashi;Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,1987

3. A microminiature electric-to-fluidic valve;Zdeblick;Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,1987

4. G. A. Racine and Ph. Krebs, Application of silicon micromachining to the fabrication of microvalves from Research Project Reports, Microelectronics and Microfabricated Transducers, The Institute of Microtechnology, University of Neuchaˆtel, Switzerland.

5. Microrobots and micromechanical systems;Trimmer;Sensors and Actuators,1989

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