Surface-micromachined mirrors for laser-beam positioning-Reference-Cited by-同舟云学术

Surface-micromachined mirrors for laser-beam positioning

Published:1996-03 Issue:1-3 Volume:52 Page:76-80
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Tien N.C.,Solgaard O.,Kiang M-H.,Daneman M.,Lau K.Y.,Muller R.S.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Microfabricated hinges;Pister;Sensors and Actuators A,1992

2. Micromachined alignment mirrors for active opto-electronic packaging;Solgaard,1994

3. Three-dimensional micro-Fresnel optical elements fabricated by micromachining technique;Lin;Electron. Lett.,1994

4. Optoelectronic packaging using silicon surface-micromachined alignment mirrors;Solgaard;IEEE Photonics Technol. Lett.,1995

5. Polysilicon linear microvibromotors;Lee,1993

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