Author:
Rangsten P.,Smith L.,Rosengren L.,Hök B.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. Airborne ultrasonic transducer with solid dielectric utilizing (100) silicon surface anisotropic etching;Suzuki,1987
2. O. Brand, H. Baltes and U. Baldenweg, Ultrasound-transducer using membrane resonators realized with bipolar IC technology, IEEE Workshop Micro Electro Mechanical Systems, MEMS-94, Oiso, Japan, pp. 33–38.
3. Micro-fabricated acoustic and ultrasonic source/reciever;Lal,1993
4. Active joints for microrobotic limbs;Elwenspoek;J. Micromech. Microeng.,1992
5. A new electrostatic actuator providing improved stroke length and force;Branebjerg,1992
Cited by
20 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献