Magnetic microactuation of torsional polysilicon structures-Reference-Cited by-同舟云学术

Magnetic microactuation of torsional polysilicon structures

Published:1996-05 Issue:1-3 Volume:53 Page:392-397
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Judy Jack W,Muller Richard S

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Microactuators with moving magnets for linear, torsional, or multiaxial motion;Wagner;Sensors and Actuators A,1992

2. A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils;Ahn,1993

3. A first functional current excited planar rotational magnetic micromotor;Guckel,1993

4. Magnetic microactuation of polysilicon flexure structures;Judy,1994

5. Magnetic microactuators with polysilicon flexures;Judy,1994

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