Microactuators with moving magnets for linear, torsional or multiaxial motion-Reference-Cited by-同舟云学术

Microactuators with moving magnets for linear, torsional or multiaxial motion

Published:1992-04 Issue:1-3 Volume:32 Page:598-603
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Wagner B.,Benecke W.,Engelmann G.,Simon J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. A vibrating cantilever magnetic field sensor;Hetrick;Sensors and Actuators,1989

2. Tuning forks in silicon;Buser;Proc. MEMS Workshop, Salt Lake City, UT, USA,1989

3. Silicon pressure sensor integrates resonant strain gauge on diaphragm;Ikeda;Sensors and Actuators,1990

4. An optically-addressed silicon strain sensor;Naden;Sensors and Actuators,1989

5. The design and fabrication of a magnetically actuated micromachined flow valve;Smith;Sensors and Actuators A,1990

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