A CMOS-compatible 2-D vertical Hall magnetic-field sensor using active carrier confinement and post-process micromachining-Reference-Cited by-同舟云学术

A CMOS-compatible 2-D vertical Hall magnetic-field sensor using active carrier confinement and post-process micromachining

Published:1996-05 Issue:1-3 Volume:53 Page:278-283
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Paranjape M,Landsberger L.M,Kahrizi Mojtaba

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Integrated semiconductor magnetic field sensors;Baltes,1986

2. Magnetic field sensitive multicollector n-p-n transistors;Zieren;IEEE Trans. Electron Devices,1982

3. Integrated 3-D magnetic sensor based on an n-p-n transistor;Kordic;IEEE Trans. Electron Device Lett.,1986

4. MOS transistors operated in the lateral bipolar mode and their application in CMOS technology;Vittoz;IEEE J. Solid State Circuits,1983

5. BiMOS transistors: merged bipolar/sidewall MOS transistors;Kenneth;IEEE Trans. Electron Device Lett.,1989

Cited by 18 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Wide Bandwidth Lorentz-Force Magnetometer Based on Lateral Overtone Bulk Acoustic Resonator;2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS);2021-01-25

2. Piezoelectric-on-Silicon MEMS Lorentz Force Lateral Field Magnetometers;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2019-05

3. Contactless Silicon-Based Multi-Dimensional Hall Sensor with Simultaneous Magnetic Sensing and Omni-Rotational Angle Measurement;International Journal of Engineering Research in Africa;2019-02

4. Piezoelectric-on-silicon Lorentz force magnetometers based on radial contour mode disk resonators;Sensors and Actuators A: Physical;2018-10

5. Two-axis silicon Hall effect magnetometer;Sensors and Actuators A: Physical;2017-11