Author:
Kim Young W.,Allen Mark G.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. Polycrystalline silicon micromechanical beams;Howe;J. Electrochem. Soc.,1983
2. Design and calibration of a microfabricated floating element shearstress sensor;Schmidt;IEEE Trans. Electron Devices,1988
3. IC-processed electrostatic micromotors;Fan;Proc. 1988 IEEE Int. Electron Devices Meeting, San Francisco, CA, USA,1988
4. Electrostatic comb driver of lateral polysilicon resonators;Tang;Sensors and Actuators,1990
5. Fabrication of microstructures using the LIGA process;Ehrfeld;Proc. IEEE Microrobots and Teleoperators Workshop, Hyannis, MA, USA,1987
Cited by
13 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献