The merit of using silicon for the development of hearing aid microphones and intraocular pressure sensors-Reference-Cited by-同舟云学术

The merit of using silicon for the development of hearing aid microphones and intraocular pressure sensors

Published:1994-04 Issue:1-3 Volume:41 Page:223-229
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Bergveld P.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference15 articles.

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2. Optimal design of an electret microphone metal-oxide-semiconductor field-effect transistor preamplifier;van der Donk;J. Acoust. Soc. Am.,1992

3. A silicon subminiature electret microphone;Sprenkels,181988

4. Development of an electret microphone in silicon;Sprenkels;Sensors and Actuators,1989

5. Investigations on the surface conductivity of silicon dioxide and methods to reduce it;Voorthuyzen;Surf. Sci.,1987

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1. Intraocular Pressure Monitoring Sensors;IEEE Sensors Journal;2008-01

2. Stress Analysis of a Novel MEMS Microphone Chip Using Finite Element Analysis;Electronic and Photonic Packaging, Electrical Systems Design and Photonics, and Nanotechnology;2005-01-01

3. Physical Sensors and Their Applications in Biomedicine;Sensors in Biomedical Applications;2000-05

4. Silicon microphones - a Danish perspective;Journal of Micromechanics and Microengineering;1998-06-01

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