Microsystems technology: objectives-Reference-Cited by-同舟云学术

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Microsystems technology: objectives

Published:1996-08 Issue:1-2 Volume:56 Page:151-166
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Fluitman Jan

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference277 articles.

1. Silicon Sensors;Middelhoek,1989

2. Small Machines Large Opportunities: A Report on the Emerging Field of Microdynamics,1987

3. Europractice, Microsystems in the 4th Framework Program;Beernaert;MST News,1995

4. Japanese activities in micromachining;Hirano;MST News,1995

5. Report on the microelectromechanics project;PACT project team,1995

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