Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Announcing: the virtual wafer fab,1992
2. ASEP: a CAD program for silicon anisotropic etching;Buser;Sensors and Actuators A,1991
3. Ätzen von Silizium simulieren;Görlitz;Feinwerktechnik Messtechnik,1990
Cited by
9 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献