Tactile image detection using a 1k-element silicon pressure sensor array-Reference-Cited by-同舟云学术

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Tactile image detection using a 1k-element silicon pressure sensor array

Published:1990-06 Issue:1-3 Volume:22 Page:397-400
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Sugiyama Susumu,Kawahata Ken,Yoneda Masakazu,Igarashi Isemi

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference2 articles.

1. Micro-diaphragm pressure sensor;Sugiyama;Tech. Digest, IEEE IEDM, Los Angeles, CA, U.S.A.,1986

2. High-resolution silicon pressure imager with CMOS processing circuits;Sugiyama;Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators, Tokyo, Japan,251987

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