Tailored modeling: A way to the 'virtual microtransducer fab'?-Reference-Cited by-同舟云学术

Tailored modeling: A way to the 'virtual microtransducer fab'?

Published:1995-03 Issue:1-3 Volume:47 Page:603-612
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Wachutka Gerhard

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference31 articles.

1. Microtransducers by industrial IC technologies and micromachining;Baltes,1992

2. W. Ehrfeld, P. Bley, F. Götz, P. Hagmann, A. Maner, J. Mohr, H.O. Moser, D. Münchmeyer, W. Schelb, D. Schmidt and E.W. Becker, Fabrication of microstructures using the LIGA process, Proc. MicroRobots Teleoperators Workshop, Hyannis, Cape Cod, USA, Nov. 9–11, 1987

3. Problem-oriented modeling of microtransducers: State of the art and future challenges;Wachutka;Sensors and Actuators A,1994

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