A fast liquid flow sensor with thermal isolation by oxide-filled trenches

Author:

Kersjes R.,Mokwa W.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. An ultra-sensitive silicon pressure-based microflow sensor;Cho;IEEE Trans. Electron Devices,1992

2. Silicon gas flow sensors using industrial CMOS and bipolar IC technology;Moser;Sensors and Actuators A,1991

3. Polysilicon-bridges for anemometer applications;Tai;Proc. 3rd Int. Conf. Solid-State Sensors and Actuators (Transducers '85),1985

4. Environmentally rugged, wide dynamic range microstructure airflow sensor;Ohnstein;IEEE Solid-State Sensor and Actuator,1990

5. Reduction of heat loss of silicon membranes by the use of trench etching techiques;Werno;Sensors and Actuators A,1994

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