1. Polysilicon layers lead to a new generation of pressure sensors;Obermeier;Tech. Digest, Proc. 3rd Int. Conf. Solid-State Sensors and Actuators (Transducers '85), Philadelphia, PA, U.S.A.,11141985
2. Polysilicon SOI pressure sensor;Suski;Sensors and Actuators,1989
3. Temperature independent pressure sensor using polycrystalline silicon strain gauges;Schäfer;Sensors and Actuators,1989
4. Capteurs de pression á technologie SOI;de la Celle;Proc. Capteurs '89, Paris,691989
5. The piezoresistive properties of polycrystalline silicon films;Suski;Electrochem. Soc. Conf., San Diego, CA, U.S.A.,1986