Compatibility between bipolar readout electronics and microstructures in silicon-Reference-Cited by-同舟云学术

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Compatibility between bipolar readout electronics and microstructures in silicon

Published:1992-03 Issue:1-3 Volume:31 Page:188-199
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Mahmoud K.M.,Wolffenbuttel R.F.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Sensors with digital or frequency output;Middelhoek;Sensors and Actuators,1988

2. Smart sensors;Giachino;Sensors and Actuators,1986

3. Signal conditioning on the sensor chip;Huijsing;Sensors and Actuators,1986

4. Analog circuit for interfacing silicon optical sensors and driving a dual-slope A/D converter for logarithmic read-out.;Wolffenbuttel;Sensors and Actuators,1990

5. Introduction to sensors compatible with microprocessors;van Herwaarden;Microprocessors and Microsystems,1990

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1. Micromachining Technology;MEMS: A Practical Guide to Design, Analysis, and Applications;2006

2. Micromachining Technology;MEMS;2006

3. Integration of silicon MEMS devices: Materials and processing considerations;Smart Materials Bulletin;2001-01

4. Integration of MEMS devices;SPIE Proceedings;1999-09-29

5. Silicon Microsensors;Micro Mechanical Systems - Principles and Technology;1998

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