Digital compensated capacitive pressure sensor using CMOS technology for low-pressure measurements-Reference-Cited by-同舟云学术

Digital compensated capacitive pressure sensor using CMOS technology for low-pressure measurements

Published:1992-08 Issue:2 Volume:34 Page:173-177
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Nagata Tomio,Terabe Hiroaki,Kuwahara Sirou,Sakurai Shizuki,Tabata Osamu,Sugiyama Susumu,Esashi Masayoshi

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. A miniature integrated capacitive pressure sensor;Matumoto;Tech. Digest, 9th Sensor Symp., Japan,1990

2. Capacitive pressure sensor for low pressure measurements with high overpressure tolerance;Terabe;Tech. Digest, 10th Sensor Symp., Japan,1991

3. A CMOS front-end circuit for a capacitive pressure sensor;Kjensmo;Sensors and Actuators,1990

4. Solid-state capacitive pressure transducers;Ko;Sensors and Actuators,1986

5. Anisotropic etching of silicon with quaternary ammonium hydroxide solutions;Tabata;Tech. Digest, 9th Sensor Symp., Japan,1990

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