1. A pressure-balanced electrostatically-actuated microvalve;Huff;Tech. Digest, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, USA,1990
2. Micromachined silicon microvalve;Ohnstein;Proc. IEEE Micro Electro Mechanical Systems, Napa Valley, CA, USA,1990
3. Normally closed microvalve and micropump fabricated on a silicon wafer;Esashi;Proc., IEEE Micro Electro Mechanical Systems, Salt Lake City, UT, USA,1989
4. A microminiature electric-to-fluidic valve;Zdeblick;Proc. 4th Int. Conf Solid-State Transducers and Actuators, (Transducers '87), Tokyo, Japan,251987
5. Electrically-activated micromachined diaphragm valves;Jerman;Tech. Digest, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, USA,1990