1. Lin L, Chiao C, Luo JJ, Sun TP (1996) Electro, thermal and elastic characterizations of suspended micro beams. The second international workshop on thermal investigations of ICs and microstructures, Budapest, pp 219–223
2. McCarthy M, Tiliakos N, Modi V, Frechette LG (2007) Thermal buckling of eccentric microfabricated nickel beams as temperature regulated nonlinear actuators for flow control. Sens Actuators A 34(1):37–46
3. Zdeblick MJ, Angell JB (1987) A microminiature electro-fluidic valve. In: Proceeedings of the 4th international conference on solid-state sensors and actuators, Tokyo, Japan, pp 827–829
4. Hsu CP, Hsu WY (2000) A two-way membrane-type micro-actuator with continuous deflections. J Micromech Microeng 10:387–394
5. Buehler WJ, Gilfrich JV, Wiley RC (1963) Effect of low temperature phase changes on the mechanical properties of alloy near composition Ti − Ni. J Appl Phys 34:1475