Microfabrication of complex surface topographies using grey-tone lithography-Reference-Cited by-同舟云学术

Microfabrication of complex surface topographies using grey-tone lithography

Published:1995-01 Issue:1-3 Volume:46 Page:89-94
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Wagner B.,Quenzer H.J.,Henke W.,Hoppe W.,Pilz W.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. M. Hisanaga, T. Koumura and T. Hattori, Fabrication of 3-dimensionally shaped Si diaphragm dynamic focusing mirror, MEMS '1993, p. 30

2. D.R. Purdy, Fabrication of complex micro-optic components using photo-sculpting through half-tone transmission masks, IOP Conf., Focus on Micromechanics, Warwick, June 1993, IOP Publishing, London

3. Micro-optics technology development for advanced sensors;Gal,1993

4. W. Döldissen, H. Engel, J. Wengelink and H.J. Hensel, Lithographic fabrication of integrated micro-optical elements, Proc. Eur. Conf. Int. Optics (ECIO '93), Neuchâtel, Switzerland, April 1993, pp. 4–10

5. W. Henke, W. Hoppe, H.J. Quenzer, P. Staudt-Fischbach and B. Wagner, Simulation and experimental study of grey-tone lithography for the fabrication of arbitrarily shaped surfaces, Proc. IEEE Micro Electro Mechanical Systems, 1994, pp. 205–210

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