Fabrication of hollow silicon microneedles using grayscale lithography and deep reactive ion etching
Author:
Affiliation:
1. School of Microelectronics, Shanghai University 1 , Shanghai 201800, China
2. Department of Electrical and Computer Engineering, Waterloo Institute for Nanotechnology (WIN), University of Waterloo 2 , Waterloo N2L 3G1, Canada
Abstract
Publisher
American Vacuum Society
Link
https://pubs.aip.org/avs/jvb/article-pdf/doi/10.1116/6.0003711/20092721/053001_1_6.0003711.pdf
Reference37 articles.
1. Impact of MEMS technology on society
2. A BioMEMS Review: MEMS Technology for Physiologically Integrated Devices
3. A graphene-based electrochemical device with thermoresponsive microneedles for diabetes monitoring and therapy
4. In-plane silicon microneedles with open capillary microfluidic networks by deep reactive ion etching and sacrificial layer based sharpening
5. Fabrication of Composite Microneedle Array Electrode for Temperature and Bio-Signal Monitoring
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