Author:
Le Berre M.,Lemiti M.,Barbier D.,Pinard P.,Cali J.,Bustarret E.,Sicart J.,Robert J.L.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference16 articles.
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3. Piezoresistance in polysilicon;French;Electron. Lett.,1984
4. Piezoresistive properties of polycrystalline and crystalline silicon films;Schubert;Sensors and Actuators,1987
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