A novel silicon accelerometer with a surrounding mass structure-Reference-Cited by-同舟云学术

A novel silicon accelerometer with a surrounding mass structure

Published:1990-02 Issue:1-3 Volume:21 Page:308-311
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Yamada K.,Higuchi K.,Tanigawa H.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference3 articles.

1. A batch fabricated silicon accelerometer;Roylance;IEEE Trans. Electron Devices, ED-26,1979

2. Novel electrochemical micromachining and its application for semiconductor accelerometer sensor IC;Nakamura;Tech. Digest, 4th Int. Conf. Solid-Stage Sensors and Actuators (Transducers '87), Tokyo, Japan,251987

3. Design optimization for cantilever type accelerometers;Seidel;Sensors and Actuators

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