Resonant-bridge two-axis microaccelerometer-Reference-Cited by-同舟云学术

Resonant-bridge two-axis microaccelerometer

Published:1990-02 Issue:1-3 Volume:21 Page:342-345
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Chang S.C.,Putty M.W.,Hicks D.B.,Li C.H.,Howe R.T.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Resonant microsensors;Howe;Proc. 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987

2. Vibrating quartz crystal beam accelerometer;Albert;Proc. 28th ISA Int. Instrument. Symp., Las Vegas, NV, U.S.A.,361982

3. A thermally-excited silicon accelerometer;Satchell;Sensors and Actuators,1989

4. Resonant-microbridge vapor sensor;Howe;IEEE Trans. Electron Devices,1986

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