Movable micromachined silicon plates with integrated position sensing-Reference-Cited by-同舟云学术

Movable micromachined silicon plates with integrated position sensing

Published:1990-02 Issue:1-3 Volume:21 Page:211-214
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Allen Mark G.,Scheidl Martin,Smith Rosemary L.,Nikolich Aleks D.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

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5. Fiberoptic switching and multiplexing with a micromechanical scanning mirror;Gustafsson;Tech. Digest, 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,251987

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