Piezoresistive low-pressure sensor with high sensitivity and high accuracy-Reference-Cited by-同舟云学术

Piezoresistive low-pressure sensor with high sensitivity and high accuracy

Published:1990-02 Issue:1-3 Volume:21 Page:142-145
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Sandmaier H.,Kühl K.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. Silicon sensors: full of promises and pitfalls;Middelhoek;J. Phys. E: Sci. Instrum.,1987

2. A special silicon diaphragm pressure sensor with high output and high accuracy;Shimazoe;Sensors and Actuators,1982

3. The influence of tensile forces on the deflection of circular diaphragms in pressure sensors;Voorthuyzen;Sensors and Actuators,1984

4. Reduzierung der Nichtlinearität von Siliziumdrucksensoren für kleine Drücke;Sandmaier;NTG- Fachbericht 93, Sensoren- Technologie und Anwendung, Bad Nauheim, F.R.G.,1986

5. Untersuchung des nichtlinearen Verhaltens piezoresistiver Niederdrucksensoren auf der Basis von Silizium;Sandmaier,1988

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design of the Oil Well Multi-Parameter Monitoring System;Advanced Materials Research;2011-11

2. Silicon microstructuring technology;Materials Science and Engineering: R: Reports;1996-09

3. A square-diaphragm piezoresistive pressure sensor with a rectangular central boss for low-pressure ranges;IEEE Transactions on Electron Devices;1993-10

4. Analysis of nonlinearity in high sensitivity piezoresistive pressure sensors;Sensors and Actuators A: Physical;1993-06

5. Non-linear analytical modelling of bossed diaphragms for pressure sensors;Sensors and Actuators A: Physical;1991-05