A special silicon diaphragm pressure sensor with high output and high accuracy
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference8 articles.
1. Analysis of the non-linear characteristics of a semiconductor pressure sensor;Nishihara;Trans. SICE (Japan),1981
2. Silicon diffused-element piezoresistive diaphragms;Tufte;J. Appl. Phys.,1962
3. An IC piezoresistive pressur sensor for biomedical instrumentation;Wise;IEEE Trans.,1973
4. Piezoresistive Properties of Silicon Diffused Layers
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