Microlever with combined integrated sensor/actuator functions for scanning force microscopy-Reference-Cited by-同舟云学术

Microlever with combined integrated sensor/actuator functions for scanning force microscopy

Published:1994-05 Issue:1-3 Volume:43 Page:339-345
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Brugger J.,Blanc N.,Renaud Ph.,de Rooij N.F.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

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2. Atomic force microscopy;Rugar;Physics Today,1990

3. M. Tortonese, H. Yamada, R.C. Barrett and C.F. Quate, Atomic force microscopy using a piezoresistive cantilever, Tech. Digest, 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, June 24–28, 1991, pp. 448–451

4. T. Itoh and T. Suga, Piezoelectric force sensor for scanning force microscopy, Tech. Digest, 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, June 7–10, 1993, pp. 610–613

5. A planar process for microfabrication of a scanning tunneling microscope;Akamine;Sensors and Actuators,1990

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