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Integrated Circuit Technologies

Published:2003 Issue: Volume: Page:1-25
ISSN:
Container-title:Nano and Giga Challenges in Microelectronics
language:
Short-container-title:

Author:

Zeitzoff Peter M.,Hutchby James A.,Bersuker Gennadi,Huff Howard R.

Publisher

Elsevier

Reference96 articles.

1. Lithography and the Future of Moore's Law;Moore,1995

2. Progress in Digital Integrated Electronics;Moore;IEDM Tech. Digest,1975

3. Cramming More Components onto Integrated Circuits;Moore;Electronics,1965

4. Sub-100 nm Gate Stack/Ultrashallow Junction Integration Challenges;Huff;ECS PV,2001

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Synthesis and Dielectric Studies of Monoclinic Nanosized Zirconia;Advances in Condensed Matter Physics;2014

2. Molecular dynamics study of one dimensional nanoscale Si/SiO2 interfaces;The European Physical Journal D;2013-05

3. Nanosized High κ Dielectric Material for FINFET;Integrated Ferroelectrics;2010-11-12

4. Impact of the crystal structure ofHfO2on the transport properties of modelHfO2/Si/HfO2silicon-on-insulator field-effect transistors: A combined DFT-scattering theory approach;Physical Review B;2009-06-04

5. Zirconium and hafnium oxide interface with silicon: Computational study of stress and strain effects;Computational Materials Science;2008-10

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