Vibrating Gyroscopes
Author:
Publisher
Elsevier
Reference48 articles.
1. Structurally decoupled micromachined gyroscopes with post-release capacitance enhancements;Acar;J. Micromech. Microeng.,2005
2. Ayazi F 2000 A high aspect-ratio high-performance polysilicon vibrating ring gyroscope. Ph.D. dissertation, The University of Michigan
3. High aspect-ratio combined poly and single-crystal silicon (HARPSS) MEMS technology;Ayazi;IEEE/ASME J. Microelectromech. Syst.,2000
4. A HARPSS polysilicon vibrating ring gyroscope;Ayazi;IEEE J. Microelectromech. Syst.,2001
5. Bae S, Hayworth K, Shcheglov K, Yee K, Wiberg D 2002 JPL’s MEMS gyroscope – Fabrication, 8-electrode tuning and performance results. Tech. Dig. Solid-State Sensors and Actuators Workshop 2002, Hilton Head Island, SC, USA
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Micro ultrasonic machining hemispherical mold for MEMS resonator gyroscope using a novel ultraprecise ceramic entire-ball tool;Journal of Micromechanics and Microengineering;2020-05-22
2. Analysis and Design of a Polygonal Oblique Beam for the Butterfly Vibratory Gyroscope with Improved Robustness to Fabrication Imperfections;Micromachines;2018-04-24
3. An Interface for Low-Q Micromachined Gyroscope;Key Engineering Materials;2012-02
4. A dynamical envelope model for vibratory gyroscopes;Microsystem Technologies;2009-12-25
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