Micro ultrasonic machining hemispherical mold for MEMS resonator gyroscope using a novel ultraprecise ceramic entire-ball tool-Reference-Cited by-同舟云学术

Micro ultrasonic machining hemispherical mold for MEMS resonator gyroscope using a novel ultraprecise ceramic entire-ball tool

Published:2020-05-22 Issue:7 Volume:30 Page:075007
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Zhao Jun^ORCID,Wang Rui,Huang Jinfeng,Hu Bingwen,Ji Shiming

Funder

Zhejiang Provincial Natural Science Foundation of China

National Natural Science Foundation of China

Foundation of Key Laboratory of Special Purpose Equipment and Advanced Processing Technology (Zhejiang University of Technology), and Ministry of Education & Zhejiang Province

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1088/1361-6439/ab8be2/pdf

Reference33 articles.

1. The Development of Micromachined Gyroscope Structure and Circuitry Technology

2. Vibrating Gyroscopes

3. 3-D micromachined hemispherical shell resonators with integrated capacitive transducers

4. Fabrication and testing of hemispherical MEMS wineglass resonators

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