Author:
Shirai K.,Yamaguchi H.,Katayama-Yoshida H.
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. Point defects and dopant diffusion in silicon
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4. Enhanced diffusion of oxygen in silicon due to resonant laser excitation of local vibrational mode
5. Control of impurity diffusion in silicon by IR laser excitation
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