Introduction-Reference-Cited by-同舟云学术

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Introduction

Published:2015 Issue: Volume: Page:1-23
ISSN:
Container-title:Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology
language:
Short-container-title:

Author:

Bhattacharyya Bijoy

Publisher

Elsevier

Reference22 articles.

1. Current status in, and future trends of, ultra-precision machining and ultrafine materials processing;Taniguchi;Ann. CIRP,1983

2. There is plenty of room at the bottom;Feynman;Eng. Sci.,1960

3. Microsystems technology: objectives;Fluitman;Sens. Actuators: A Phys.,1996

4. MEMS, a Practical Guide to Design, Analysis and Applications;Korvink,2006

5. Microsystem Design;Senturia,2000

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