Simultaneous control of particle contamination and VOC pollution under different operating conditions of a mini-environment that contains a coating process-Reference-Cited by-同舟云学术

Simultaneous control of particle contamination and VOC pollution under different operating conditions of a mini-environment that contains a coating process

Published:2000-02 Issue:2 Volume:35 Page:91-99
ISSN:0360-1323
Container-title:Building and Environment
language:en
Short-container-title:Building and Environment

Author:

Chuah Y.K,Tsai C-H,Hu S.C

Publisher

Elsevier BV

Subject

Building and Construction,Geography, Planning and Development,Civil and Structural Engineering,Environmental Engineering

Reference5 articles.

1. Certification and acceptance of mini-environment air system;Baechle,1993

2. Experimental studies of mini-environment types;Eissler,1994

3. Designing methods to obtain a less contaminated air-flow at the product level;Schliesser,1994

4. Minienvironment effects on the process performance of a resist spin coater;Carpenter,1994

5. Fluid Mechanics;White,1986

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