Effect of substrate bias on β-SiC films prepared by PECVD-Reference-Cited by-同舟云学术

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Effect of substrate bias on β-SiC films prepared by PECVD

Published:2003-04 Issue:3 Volume:98 Page:190-192
ISSN:0921-5107
Container-title:Materials Science and Engineering: B
language:en
Short-container-title:Materials Science and Engineering: B

Author:

Wang B.,Liu W.,Wang G.J.,Liao B.,Wang J.J.,Zhu M.K.,Wang H.,Yan H.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference7 articles.

1. Surface analysis of nanostructured ceramic coatings containing silicon carbide nanoparticles produced by plasma modulation chemical vapour deposition

2. Generation of diamond nuclei by electric field in plasma chemical vapor deposition

3. Textured growth of diamond on silicon viain situcarburization and bias‐enhanced nucleation

4. Infrared Properties of Cubic Silicon Carbide Films

5. Fabrication of Nanoscale Cubic SiC Particle Film

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Microstructure, mechanical and high-temperature tribological properties of amorphous SiC films by pulsed magnetron sputtering;Journal of Non-Crystalline Solids;2023-01

2. Effect of substrate bias on the promotion of nanocrystalline silicon growth from He-diluted SiH4 plasma at low temperature;Journal of Materials Research;2012-02-16

3. Mechanical and structural properties of RF magnetron sputter-deposited silicon carbide films for MEMS applications;Journal of Micromechanics and Microengineering;2012-01-13

4. Sputter Deposition of Nanocrystalline β-SiC Films and Molecular Dynamics Simulations of the Sputter Process;Journal of Nanoscience and Nanotechnology;2010-02-01

5. Influence of substrate bias on the composition of SiC thin films fabricated by PECVD and underlying mechanism;Surface and Coatings Technology;2007-04

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