Ellipsometry as a powerful tool for the control of epitaxial semiconductor structures in-situ and ex-situ-Reference-Cited by-同舟云学术

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Ellipsometry as a powerful tool for the control of epitaxial semiconductor structures in-situ and ex-situ

Published:1997-02 Issue:1-3 Volume:44 Page:164-167
ISSN:0921-5107
Container-title:Materials Science and Engineering: B
language:en
Short-container-title:Materials Science and Engineering: B

Author:

Svitashev K.K.,Shvets V.A.,Mardezhov A.S.,Dvoretsky S.A.,Sidorov Yu.G.,Mikhailov N.N.,Spesivtsev E.V.,Rychlitsky S.V.

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference14 articles.

1. Ellipsometry: a technique for real time monitoring and analysis of MBE-grown CdHgTe and CdTe/HgTe superlattices

2. In situ spectroscopic ellipsometry during molecular‐beam epitaxy of cadmium mercury telluride

3. Ellipsometric profiling of HgCdTe heterostructures

Cited by 18 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ellipsometric thermometry in molecular beam epitaxy of mercury cadmium telluride;Infrared Physics & Technology;2021-08

2. Investigation of the Temperature Dependence of the Spectra of Optical Constants of Hg1 – xCdхTe Films Grown Using Molecular Beam Epitaxy;Optics and Spectroscopy;2021-01

3. Parametric Model of the Optical Constant Spectra of Hg1 – xCdxTe and Determination of the Compound Composition;Optics and Spectroscopy;2020-12

4. Determining the Compositional Profile of HgTe/CdxHg1 – xTe Quantum Wells by Single-Wavelength Ellipsometry;Optics and Spectroscopy;2019-08

5. Methodological and instrumental problems in high-precision in situ ellipsometry diagnostics of the mercury cadmium telluride layer composition in molecular beam epitaxy;Instruments and Experimental Techniques;2016-11

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