Contactless electromodulation and surface photovoltage spectroscopy for the nondestructive, room temperature characterization of wafer-scale III–V semiconductor device structures
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference59 articles.
1. Modulation spectroscopy of semiconductors: bulk/thin film, microstructures, surfaces/interfaces and devices
2. Modulation Spectroscopy Characterization of Semiconductor Heterostructures
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