Non-monotonous evolution of hybrid PVD–PECVD process characteristics on hydrocarbon supply-Reference-Cited by-同舟云学术

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Non-monotonous evolution of hybrid PVD–PECVD process characteristics on hydrocarbon supply

Published:2013-10 Issue: Volume:232 Page:283-289
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Schmidtová T.,Souček P.,Kudrle V.,Vašina P.

Funder

Czech Science Foundation

European Regional Development Fund

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference38 articles.

1. The Foundations of Vaccum Coating Technology;Mattox,2003

2. Hybrid processes — a versatile technique to match process requirements and coating needs

3. Hybrid techniques in surface engineering

4. Description of a hybrid PECVD-PVD process: Application to Zn–Si–O and Ti–Si–O composites thin films

5. Target effects during the deposition of Ti-a-C:H films

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3. Study on galling behaviour of HiPIMS deposited Mo/DLC multilayer coatings at ambient and elevated temperature;Wear;2022-06

4. Hydrogenation and hybridization in hard W-C:H coatings prepared by hybrid PVD-PECVD method with methane and acetylene;International Journal of Refractory Metals and Hard Materials;2020-04

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