Description of a hybrid PECVD-PVD process: Application to Zn–Si–O and Ti–Si–O composites thin films
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference21 articles.
1. Hybrid techniques in surface engineering
2. Hybrid processes — a versatile technique to match process requirements and coating needs
3. Nanostructured copper–carbon composite thin films produced by sputter deposition/microwave plasma-enhanced chemical vapor deposition dual process
4. Characteristics of copper/carbon and nickel/carbon composite films produced by microwave plasma-assisted deposition techniques from argon–methane gas mixtures
5. Local structure of composite Cr-containing diamond-like carbon thin films
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Si-enabled self-lubrication and wear resistance of CrCoNiSi medium-entropy alloy films;Journal of Materials Research and Technology;2024-05
2. Advances and Perspectives of Titanium-Based Nanocomposites for Energy Generation and Environmental Remediation Applications: A Review;Energy & Fuels;2023-10-05
3. Deposition of organosilicon coatings from trimethylsilyl acetate and oxygen gases in capacitively coupled RF glow discharge;Progress in Organic Coatings;2020-12
4. Non-monotonous evolution of hybrid PVD–PECVD process characteristics on hydrocarbon supply;Surface and Coatings Technology;2013-10
5. Using a Dual Plasma Process to Produce Cobalt-Polypyrrole Catalysts for the Oxygen Reduction Reaction in Fuel Cells;Journal of The Electrochemical Society;2012
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3