Development of pinhole-free amorphous aluminum oxide protective layers for biomedical device applications-Reference-Cited by-同舟云学术

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Development of pinhole-free amorphous aluminum oxide protective layers for biomedical device applications

Published:2013-06 Issue: Volume:224 Page:101-108
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Litvinov Julia,Wang Yi-Ju,George Jinnie,Chinwangso Pawilai,Brankovic Stanko,Willson Richard C.,Litvinov Dmitri

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference19 articles.

1. Properties of aluminium oxide thin films deposited by reactive magnetron sputtering

2. Atomic Layer Deposited Protective Coatings for Micro-Electromechanical Systems;Hoivik,2003

3. Antibacterial effects of Ag-HAp thin films on alumina substrates

4. The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems

5. Structure-property correlations in aluminum oxide thin films grown by reactive AC magnetron sputtering

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