Author:
Depla D.,Strijckmans K.,De Gryse R.
Funder
Research Foundation—Flanders
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference21 articles.
1. Sputter deposition processes;Depla,2008
2. Principles of Plasma Discharges and Materials Processing;Lieberman,1994
3. Spatial structure of a planar magnetron discharge
4. Simplified Model for the DC Planar Magnetron Discharge;Buyle,2005
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