Author:
Scheuer J.T,Lenoble D,Reynard J.-P,Lallement F,Grouillet A,Arevalo A,Distaso D,Downey D,Fang Z,Godet L,Koo B.W,Miller T,Weeman J
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference4 articles.
1. Proceedings, 14th Int Conf. Ion Implant. Tech, IEEE;Renau,2002
2. Proceedings, 13th Int Conf. Ion Implant. Tech, IEEE;Liebert,2000
3. Review of Low Energy Doping and Activation Technologies;Renau,2003
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