TiN deposition and ion current distribution for trench target by plasma-based ion implantation and deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference11 articles.
1. Homogeneity of metal plasma immersion ion implantation and deposition
2. Preparation and characterization of TiN coatings produced by combination of PI3D and ICP assisted magnetron PVD
3. Inner surface coating of TiN by the grid-enhanced plasma source ion implantation technique
4. TiN coating to three-dimensional materials by PBII using vacuum titanium arc plasma
5. TiN coating and ion implantation of materials with three-dimensional topology in metal DC plasma-based ion implantation
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Metal Plasma Source Ion Implantation Using a Pulsed Cathodic Arc;Materials Science Forum;2007-01
2. Characterization of nanostructured Fe/C multilayers by a pulsed cathodic arc;Journal of Electroceramics;2006-12
3. TiN and TiO2:Nb thin film preparation using hollow cathode sputtering with application to solar cells;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2006-07
4. Parametric Study of Zirconium Oxide Films Using Plasma-Based Ion Implantation and Deposition;Plasma Processes and Polymers;2006-01-16
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