TiN coating to three-dimensional materials by PBII using vacuum titanium arc plasma
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference6 articles.
1. Repetitively pulsed metal ion beams for ion implantation
2. Plasma source ion‐implantation technique for surface modification of materials
3. Metal plasma immersion ion implantation and deposition using vacuum arc plasma sources
4. Development of a plasma immersion ion implanter for the surface treatment of metal components
5. Titanium nitride coating on implanted layer using titanium plasma based ion implantation
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