Author:
Miyagawa Y.,Nakadate H.,Tanaka M.,Ikeyama M.,Miyagawa S.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference14 articles.
1. Handbook of Plasma Immersion Ion Implantation and Deposition;Anders,2000
2. Ion‐matrix sheath in a cylindrical bore
3. Proceedings of 2000 Int. Conf. on Ion Implantation Technology;Miyagawa,2000
4. Computer simulation of plasma for plasma immersed ion implantation and deposition with bipolar pulses
5. Computer Simulation Using Particles;Hockney,1981
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