Feasibility study of RF sputtered ZnO film for surface micromachining
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference17 articles.
1. A piezoelectric triaxial accelerometer
2. Surface micromachined piezoelectric accelerometers (PiXLs)
3. Optimization of zinc oxide thin film for surface acoustic wave filters by radio frequency sputtering
4. Optically pumped lasing of ZnO at room temperature
5. Deposition of ZnO Thin Films by the Ultrasonic Spray Pyrolysis Technique
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2. Determination of precise crystallographic directions for mask alignment in wet bulk micromachining for MEMS;Micro and Nano Systems Letters;2016-06-11
3. The effect of pressure and W-doping on the properties of ZnO thin films for NO2 gas sensing;Applied Surface Science;2015-12
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