Determination of precise crystallographic directions for mask alignment in wet bulk micromachining for MEMS-Reference-Cited by-同舟云学术

Determination of precise crystallographic directions for mask alignment in wet bulk micromachining for MEMS

Published:2016-06-11 Issue:1 Volume:4 Page:
ISSN:2213-9621
Container-title:Micro and Nano Systems Letters
language:en
Short-container-title:Micro and Nano Syst Lett

Author:

Singh Sajal Sagar,Pal Prem,Pandey Ashok Kumar,Xing Yan,Sato Kazuo

Publisher

Springer Science and Business Media LLC

Subject

Biomedical Engineering,Biomaterials

Link

http://link.springer.com/content/pdf/10.1186/s40486-016-0027-5.pdf

Reference124 articles.

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2. Lee S, Park S, Cho D (1999) The surface/bulk micromachining (SBM) process: a new method for fabricating released microelectromechanical systems in single crystal silicon. J Microelectromech Syst 8:409–416

3. Frühauf J (2005) Shape and functional elements of the bulk silicon microtechnique: a manual of wet-etched silicon structures. Springer, Berlin

4. Pal P, Chandra S (2004) Bulk-micromachined structures inside anisotropically etched cavities. Smart Mater Struct 13:1424–1429

5. Tellier CR, Charbonnieras AR (2003) Characterization of the anisotropic chemical attack of (hhl) silicon plates in a TMAH 25 wt% solution: micromachining and adequacy of the dissolution slowness surface. Sens Actuators A Phys 105:62–75

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