Evaluation of plasma deposited fluorocarbon films using experimental design methodology
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference28 articles.
1. Plasma‐structure dependence of the growth mechanism of plasma‐polymerized fluorocarbon films with residual radicals
2. Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates
3. Flexible fluorocarbon wire coatings by pulsed plasma enhanced chemical vapor deposition
4. Plasma lithography — thin-film patterning of polymeric biomaterials by RF plasma polymerization I: Surface preparation and analysis
5. Plasma Treatment and Dry Etch Characteristics of Organic Low-kDielectrics
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